Enhanced directional sensitivity of a biomimetic MEMS acoustic localization sensor

Danny Gee; Haijun Liu; Luke Currano; Miao Yu

doi:10.1117/12.850418

28 April 2010 Enhanced directional sensitivity of a biomimetic MEMS acoustic localization sensor

Danny Gee, Haijun Liu, Luke Currano, Miao Yu

Author Affiliations +

Proceedings Volume 7682, Photonic Microdevices/Microstructures for Sensing II; 76820N (2010) https://doi.org/10.1117/12.850418
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

We present an improved microfabricated sound localization sensor for unobtrusive surveillance systems inspired by the tympanic membranes of the parasitoid fly, Ormia ochracea. The device consists of two silicon diaphragms mechanically coupled by a suspended beam that amplifies the difference in time response, dependent on the incident angle of the sound source. Fabrication techniques were modified to reduce residual stresses and improve device uniformity. Enhanced acoustic cues for devices with central pivoting anchors were measured with laser Doppler vibrometry. Device responses to weak excitations demonstrated good sensitivity over environmental noise. An order of magnitude in time difference amplification was measured at 90° incident angles with a directional sensitivity of .39μs/degree. These results provide a foundation for realizing an accurate bio-inspired MEMS directional microphone.

Citation Download Citation

Danny Gee, Haijun Liu, Luke Currano, and Miao Yu "Enhanced directional sensitivity of a biomimetic MEMS acoustic localization sensor", Proc. SPIE 7682, Photonic Microdevices/Microstructures for Sensing II, 76820N (28 April 2010); https://doi.org/10.1117/12.850418

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