"High Fill Factor Silicide Monolithic Arrays"

Walter F. Kosonocky; Gary W. Hughes

doi:10.1117/12.940565

24 September 1987 "High Fill Factor Silicide Monolithic Arrays"

Walter F. Kosonocky, Gary W. Hughes

Proceedings Volume 0782, Infrared Sensors and Sensor Fusion; (1987) https://doi.org/10.1117/12.940565
Event: 1987 Technical Symposium Southeast on Optics, Electro-Optics, and Sensors, 1987, Orlando, FL, United States

Abstract

Monolithic infrared imagers with Schottky-barrier detectors (SBDs) can be constructed with silicon VLSI technology into large and high density focal plane arrays (FPAs). This paper presents a brief review of the available Pd2Si and PtSi SBDs, of the reported SBD FPAs, and of the general consideration for the construction of high fill-factor and high-density monolithic FPAs. The four FPA multiplexer architecture reviewed are: an interline transfer CCD, a charge sweep device, a column-readout MOS, and a row-readout MOS.

Citation Download Citation

Walter F. Kosonocky and Gary W. Hughes ""High Fill Factor Silicide Monolithic Arrays"", Proc. SPIE 0782, Infrared Sensors and Sensor Fusion, (24 September 1987); https://doi.org/10.1117/12.940565

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