Analysis of the measured method for scattering properties of high-reflection coating

Huasong Liu; Zheng Luo; Zhanshan Wang; Yiqin Ji; Yongkai Fan; Rongwei Fan

doi:10.1117/12.888309

18 February 2011 Analysis of the measured method for scattering properties of high-reflection coating

Huasong Liu, Zheng Luo, Zhanshan Wang, Yiqin Ji, Yongkai Fan, Rongwei Fan

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 799529 (2011) https://doi.org/10.1117/12.888309
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

Integral scattering is one of the important loss components of high-reflection optical thin films, so suppressing integral scattering can enhance the reflectance of high-reflection coating. Using integrating sphere is the important method of the integral scattering measurement of high reflection coatings. The paper introduced the measurement method and apparatus of integral scattering for single-wavelength at incident angle of 45deg by analyzing the principle of integrating sphere. Besides the important error sources and measurement accuracy of the integral scattering were analyzed. High-reflection coating for single wavelength onto fused silica substrate at incident angle of 45deg was manufactured by ion beam sputtering deposition and integral scattering apparatus was used to measure integral scattering of high-reflection coating. Finally by comparison of the experimental result and the value of scattering theory, we achieved the practical measurement errors origin that and established the foundation of scattering loss analysis for the ultra low losses high-reflection coating.

Citation Download Citation

Huasong Liu, Zheng Luo, Zhanshan Wang, Yiqin Ji, Yongkai Fan, and Rongwei Fan "Analysis of the measured method for scattering properties of high-reflection coating", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799529 (18 February 2011); https://doi.org/10.1117/12.888309

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available