Fabrication and quantitative characterization of super smooth surface with sub-nanometer roughness

Zhengxiang Shen; Bin Ma; Tao Ding; Xiaoqiang Wang; ZhanShan Wang; Lishuan Wang; Huasong Liu; Yiqin Ji

doi:10.1117/12.888916

18 February 2011 Fabrication and quantitative characterization of super smooth surface with sub-nanometer roughness

Zhengxiang Shen, Bin Ma, Tao Ding, Xiaoqiang Wang, ZhanShan Wang, Lishuan Wang, Huasong Liu, Yiqin Ji

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 79952O (2011) https://doi.org/10.1117/12.888916
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

There is a growing requirement to use supersmooth surfaces with roughness in the sub-nanometer range. But, to produce 100mm-diameter optical elements with ultra-flat and supersmooth surfaces is still difficult. The fabrication technique based on continues polishing process is presented to produce flat optical element with extremely smooth surface. During the fabrication, A concept of "Process Controlling" is introduced, which means the machining of super-smooth surfaces is considered as a chain consisted of some key nodes, not merely a polishing process. The surface figure is tested using interferometer and the surface roughness is using interference microscopy and atom force microscopy (AFM) repectively. Then the Power Spectral Density (PSD) function, including the basic theory and the physical meaning, are presented to explain the difference of test results, which is measured by optical profiler and AFM with different parameters. The polynomial fitting results indicate that there is excellent agreement between measurements made by the two instruments.

Citation Download Citation

Zhengxiang Shen, Bin Ma, Tao Ding, Xiaoqiang Wang, ZhanShan Wang, Lishuan Wang, Huasong Liu, and Yiqin Ji "Fabrication and quantitative characterization of super smooth surface with sub-nanometer roughness", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952O (18 February 2011); https://doi.org/10.1117/12.888916

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available