Nano-level 3D shape measurement system using color analysis method of RGB interference fringes

Sheiji Hata; Daichi Kimura; Masanobu Kaneda; Shigeaki Morimoto; Hiroaki Kobayashi

doi:10.1117/12.890153

12 July 2011 Nano-level 3D shape measurement system using color analysis method of RGB interference fringes

Sheiji Hata, Daichi Kimura, Masanobu Kaneda, Shigeaki Morimoto, Hiroaki Kobayashi

Proceedings Volume 8000, Tenth International Conference on Quality Control by Artificial Vision; 800008 (2011) https://doi.org/10.1117/12.890153
Event: 10th International Conference on Quality Control by Artificial Vision, 2011, Saint-Etienne, France

Abstract

Nano-level 3-D measurement is one of the key technologies for the current and future generation of production systems for semi-conductors, LCDs and nano-devices. To meet with these applications, wide range nano-level 3-D shape measurement method using combination of RGB laser lights has been developed. It measures the height of nano-objects from the combination of RGB LED lights interference. To analyze the combination of RGB lights, the color analysis method on xy-color plane has been introduced. In this method, the color changes on xy-color plane means the height changes. Experimental system to measure the three micro-meter height has been developed, and succeeded to measure the 50 nm step and 1000 nm step samples. The method has been applied to measure a nano-device, a contact needle for measurement. The shape of the needle has been extracted, successfully.

Citation Download Citation

Sheiji Hata, Daichi Kimura, Masanobu Kaneda, Shigeaki Morimoto, and Hiroaki Kobayashi "Nano-level 3D shape measurement system using color analysis method of RGB interference fringes", Proc. SPIE 8000, Tenth International Conference on Quality Control by Artificial Vision, 800008 (12 July 2011); https://doi.org/10.1117/12.890153

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