Development of a new technological MEMS process for AC voltage standards

F. Blard; A. Bounouh; D. Bélières; S. Charlot; D. Bourrier; H. Camon

doi:10.1117/12.886394

5 May 2011 Development of a new technological MEMS process for AC voltage standards

F. Blard, A. Bounouh, D. Bélières, S. Charlot, D. Bourrier, H. Camon

Author Affiliations +

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80662K (2011) https://doi.org/10.1117/12.886394
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

This paper describes the development of a new technological process for manufacturing MEMS with out-of-plane motion in order to develop voltage references with high stability (deviation from the nominal value less than some 10^-6per year) and working in alternating current (AC). In this application, the AC voltage reference is defined at the pull-in point of the MEMS variable capacitor made of two electrodes, one fixed and the other movable driven by an AC current having a frequency much higher than the mechanical resonant frequency. This process has been developed to get MEMS devices exhibiting high nominal capacitances, which makes the development of the read-out electronics easier, and metallized electrodes to avoid charge effects on the stability of the voltage standard. Moreover, this process allows to realize stoppers, in order to get a good operational reliability.

Citation Download Citation

F. Blard, A. Bounouh, D. Bélières, S. Charlot, D. Bourrier, and H. Camon "Development of a new technological MEMS process for AC voltage standards", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80662K (5 May 2011); https://doi.org/10.1117/12.886394

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