Flexible electronic devices rely on effective conductors integrated with elastomeric substrates. This work reports on
characterization of thin gold layers on flexible polymers as a platform for further research into their use in flexible
electronic and microsystems. This work utilizes standard microfabrication techniques and a biocompatible, silicone
polymer (polydimethylsiloxane) as the flexible substrate material. Flexible conductors defined by gold have been
realized, and the dependence of resistance on geometry has been characterized. The results follow theoretical resistance
dependence on geometry while showing an increase in the resistivity of the gold layer, a direct effect of deposition on
elastomer causing wrinkles or striations in the metal layer. This work also discusses the effect of uniaxial mechanical
deformation on thin film conductors and defines a procedure for creating and testing them in a repeatable manner. The
ability to stretch the resistors by 10%, with full recovery to original resistance value is demonstrated. This work has
implications for flexible device performance and provides a platform for integrated applications. Future work will
explore combinations with piezoelectric thin films to enable conversion of mechanical to electrical energy, as this
flexible platform will enhance the functionality of such energy generators.
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