Pulsed fiber laser texturing of metals, silicon, and ceramics: comparison of surface structural changes induced by ns and fs pulses

Sami T. Hendow; Arzu M. Ozkan; Marta Oliveira; Eric Mottay

doi:10.1117/12.908869

15 February 2012 Pulsed fiber laser texturing of metals, silicon, and ceramics: comparison of surface structural changes induced by ns and fs pulses

Sami T. Hendow, Arzu M. Ozkan, Marta Oliveira, Eric Mottay

Author Affiliations +

Proceedings Volume 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII; 82430P (2012) https://doi.org/10.1117/12.908869
Event: SPIE LASE, 2012, San Francisco, California, United States

Abstract

Various materials including aluminum (Al), monocrystalline silicon (c-Si) and alumina (Al₂O₃) were treated using two types of fiber lasers, one having femtosecond (fs) pulse width, and the other nanosecond (ns). The surfaces of these materials were characterized and evaluated by optical and electronic microscopy and surface roughness profilometry. Results obtained are correlated with the pulse energy delivery conditions, namely pulse width, average output power, pulse overlap and hatch step size. For metals, fs pulses produced shallow skin depth structuring, and contributed to structured ribbons on the surfaces of Al and c-Si, as well as conical pillars on c-Si. Ns pulses can be used to create distinct patterns or grainy structures, whose characteristics are strongly depending on the pulse overlap and pulse energy. In contrast to the relatively low roughness level encountered with the fs pulses, where the highest average arithmetic roughness of about 1.4 μm on c-Si, ns pulses produced significantly higher roughness values. The measured values for ns-textured surfaces had the range of 0.4-2.2 μm and 1.5-5 μm on c-Si and Al, respectively. Ceramics texturing require high-energy longer ns pulses due to the higher thermal thresholds required for ablation.

Citation Download Citation

Sami T. Hendow, Arzu M. Ozkan, Marta Oliveira, and Eric Mottay "Pulsed fiber laser texturing of metals, silicon, and ceramics: comparison of surface structural changes induced by ns and fs pulses", Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82430P (15 February 2012); https://doi.org/10.1117/12.908869

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