Development of high-order segmented MEMS deformable mirrors

Michael A. Helmbrecht; Min He; Carl J. Kempf

doi:10.1117/12.912547

15 February 2012 Development of high-order segmented MEMS deformable mirrors

Michael A. Helmbrecht, Min He, Carl J. Kempf

Proceedings Volume 8253, MEMS Adaptive Optics VI; 825307 (2012) https://doi.org/10.1117/12.912547
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

The areas of biological microscopy, ophthalmic research, and atmospheric turbulence correction require high-order DMs to obtain diffraction-limited images. Iris AO has been developing high-order MEMS DMs to address these requirements. Recent development has resulted in fully functional 489-actuator DMs capable of 9.5 µm stroke. For laser applications, the DMs were modified to make them compatible with high-reflectance dielectric coatings. Experimental results for the 489-actuator DMs with dielectric coatings shows they can be made with superb optical quality λ/93.3 rms (11.4 nm rms) and λ/75.9 rms (20.3 nm rms) for 1064 nm and 1540 nm coatings. Laser testing has demonstrated 300 W/cm2 power handling with off-the-shelf packaging. Power handling of 2800 W/cm2 is projected when incorporating packaging optimized for heat transfer.

Citation Download Citation

Michael A. Helmbrecht, Min He, and Carl J. Kempf "Development of high-order segmented MEMS deformable mirrors", Proc. SPIE 8253, MEMS Adaptive Optics VI, 825307 (15 February 2012); https://doi.org/10.1117/12.912547

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