Feasibility study of character projection-based electron-beam direct writing for logic LSI wiring including automatically routed area with 14nm node technology case

Shinji Sugatani; Takashi Maruyama; Yoshinori Kojima; Yasushi Takahashi; Masaki Takakuwa; Shuzo Ohshio; Masaru Ito

doi:10.1117/12.916358

21 March 2012 Feasibility study of character projection-based electron-beam direct writing for logic LSI wiring including automatically routed area with 14nm node technology case

Shinji Sugatani, Takashi Maruyama, Yoshinori Kojima, Yasushi Takahashi, Masaki Takakuwa, Shuzo Ohshio, Masaru Ito

Author Affiliations +

Proceedings Volume 8323, Alternative Lithographic Technologies IV; 832329 (2012) https://doi.org/10.1117/12.916358
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

Multi column cell (MCC) exposure system is a promising candidate for the next generation lithography tool. The concept of MCC is parallelization of the electron beam columns with character projection (CP) [1]. In this paper, we would like to describe current CP techniques being used for product manufacturing. We also would like to introduce CP based EBDW method to draw automatically routed wiring area with 14 nm node technology of 20nm half-pitch (hp) case. Pattern density influence for process margin and shot noise tolerance consideration are discussed. Feasibility study of the model character set for router generated wiring drawing is presented.

Citation Download Citation

Shinji Sugatani, Takashi Maruyama, Yoshinori Kojima, Yasushi Takahashi, Masaki Takakuwa, Shuzo Ohshio, and Masaru Ito "Feasibility study of character projection-based electron-beam direct writing for logic LSI wiring including automatically routed area with 14nm node technology case", Proc. SPIE 8323, Alternative Lithographic Technologies IV, 832329 (21 March 2012); https://doi.org/10.1117/12.916358

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