Automated yield enhancements implementation on full 28nm chip: challenges and statistics

Shobhit Malik; Sriram Madhavan; Piyush Pathak; Luigi Capodieci; Ramy Fathy; Ahmad Abdulghany

doi:10.1117/12.915920

14 March 2012 Automated yield enhancements implementation on full 28nm chip: challenges and statistics

Shobhit Malik, Sriram Madhavan, Piyush Pathak, Luigi Capodieci, Ramy Fathy, Ahmad Abdulghany

Proceedings Volume 8327, Design for Manufacturability through Design-Process Integration VI; 83270X (2012) https://doi.org/10.1117/12.915920
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

This paper shares the details of the Yield Enhancements that were done at 28nm full chip level sharing the complexity involved in implementing such a flow and then the verification challenges involved , e.g., at mask data preparation. We discuss and present the algorithm used to measure the efficiency of the tool, explaining why we used this algorithm while sharing some alternate algorithms possible. We also share the detailed statistics regarding run time, machine resource, data size, polygon counts etc. We also present good techniques used by us for efficient flow management involved in large complex 28nm chips.

Citation Download Citation

Shobhit Malik, Sriram Madhavan, Piyush Pathak, Luigi Capodieci, Ramy Fathy, and Ahmad Abdulghany "Automated yield enhancements implementation on full 28nm chip: challenges and statistics", Proc. SPIE 8327, Design for Manufacturability through Design-Process Integration VI, 83270X (14 March 2012); https://doi.org/10.1117/12.915920

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available