Data filtering of optical freeform measurement based on a modified 2D cascaded approximating spline filter

Qichang Wang; Xiaodong Zhang; Yue Peng; Fengzhou Fang

doi:10.1117/12.978166

16 October 2012 Data filtering of optical freeform measurement based on a modified 2D cascaded approximating spline filter

Qichang Wang, Xiaodong Zhang, Yue Peng, Fengzhou Fang

Author Affiliations +

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84160J (2012) https://doi.org/10.1117/12.978166
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

To achieve a high accuracy of optical freeform surfaces, it is necessary to conduct a repetition of measurementcompensation. Filtering is a key procedure in the loops to extract the actual form errors and then to generate compensation path. Although spline filter is an efficient approach, it has poor robustness when the data contains outliers. A modified spline filter is introduced in this study to enhance the robustness by a preprocessing procedure based on the M-estimation theory. The cascaded approximating method is also applied to reduce the deviation to Gaussian filter in the amplitude transmission characteristic. The 2D spline filter is also developed to process the 3D measured data of optical freeform surfaces. The effectiveness of this newly proposed method is verified by the experiments.

Citation Download Citation

Qichang Wang, Xiaodong Zhang, Yue Peng, and Fengzhou Fang "Data filtering of optical freeform measurement based on a modified 2D cascaded approximating spline filter", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84160J (16 October 2012); https://doi.org/10.1117/12.978166

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