Overcoming obstacles to creating complex MEMS platforms: parallels with the semiconductor and computer design industries

Lesley Shannon

doi:10.1117/12.2009433

9 April 2013 Overcoming obstacles to creating complex MEMS platforms: parallels with the semiconductor and computer design industries

Lesley Shannon

Author Affiliations +

Proceedings Volume 8691, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013; 86910I (2013) https://doi.org/10.1117/12.2009433
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2013, San Diego, California, United States

Abstract

Current MEMS technology is perhaps reminiscent of the early semiconductor technology industry and the first computer systems. As technologies mature, a certain pattern of evolution typically ensues. This path, however, is fraught with challenges (e.g. efficient architectural exploration), which act as discontinuities in the advancement of a technology. Overcoming these obstacles requires innovations and, generally, the establishment of infrastructure. This paper proposes one vision for the future of MEMS technology, describing how the techniques employed in circuit and computing system design can be adapted to MEMS platform design to raise the level of abstraction and facilitate the creation of complex architectures.

Citation Download Citation

Lesley Shannon "Overcoming obstacles to creating complex MEMS platforms: parallels with the semiconductor and computer design industries", Proc. SPIE 8691, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013, 86910I (9 April 2013); https://doi.org/10.1117/12.2009433

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