Continuous p-n junction with extremely low leakage current for micro-structured solid-state neutron detector applications

Kuan-Chih Huang; Rajendra Dahal; James J.-Q. Lu; Yaron Danon; Ishwara B. Bhat

doi:10.1117/12.2016121

29 May 2013 Continuous p-n junction with extremely low leakage current for micro-structured solid-state neutron detector applications

Kuan-Chih Huang, Rajendra Dahal, James J.-Q. Lu, Yaron Danon, Ishwara B. Bhat

Author Affiliations +

Proceedings Volume 8710, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XIV; 87101J (2013) https://doi.org/10.1117/12.2016121
Event: SPIE Defense, Security, and Sensing, 2013, Baltimore, Maryland, United States

Abstract

Considerable progress has been achieved recently to enhance the thermal neutron detection efficiency of solid-state neutron detectors that incorporate neutron sensitive materials such as ¹⁰B and ⁶LiF in Si micro-structured p-n junction diode. Here, we describe the design, fabrication process optimization and characterization of an enriched boron filled honeycomb structured neutron detector with a continuous p⁺-n junction. Boron deposition and diffusion processes were carried out using a low pressure chemical vapor deposition to study the effect of diffusion temperature on current density-voltage characteristics of p⁺-n diodes. TSUPREM-4 was used to simulate the thickness and surface doping concentration of p⁺-Si layers. MEDICI was used to simulate the depletion width and the capacitance of the microstructured devices with continuous p⁺-n junction. Finally, current density-voltage and pulse height distribution of fabricated devices with 2.5×2.5 mm2 size were studied. A very low leakage current density of ~2×10^-8 A/cm² at -1 V (for both planar and honeycomb structured devices) and a bias-independent thermal neutron detection efficiency of ~26% under zero bias voltage were achieved for an enriched boron filled honeycomb structured neutron detector with a continuous p⁺-n junction.

Citation Download Citation

Kuan-Chih Huang, Rajendra Dahal, James J.-Q. Lu, Yaron Danon, and Ishwara B. Bhat "Continuous p-n junction with extremely low leakage current for micro-structured solid-state neutron detector applications", Proc. SPIE 8710, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XIV, 87101J (29 May 2013); https://doi.org/10.1117/12.2016121

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