Silicon nitride waveguide with flattened chromatic dispersion

J. M. Chavez Boggio; D. Bodenmueller; T. Fremberg; R. Haynes; M. M. Roth; R. Eisermann; L. Zimmermann; M. Bohm

doi:10.1117/12.2017302

8 May 2013 Silicon nitride waveguide with flattened chromatic dispersion

J. M. Chavez Boggio, D. Bodenmueller, T. Fremberg, R. Haynes, M. M. Roth, R. Eisermann, L. Zimmermann, M. Bohm

Proceedings Volume 8772, Nonlinear Optics and Applications VII; 87720R (2013) https://doi.org/10.1117/12.2017302
Event: SPIE Optics + Optoelectronics, 2013, Prague, Czech Republic

Abstract

Dispersion engineering in integrated silicon nitride waveguides is numerically and experimentally investigated. We show that by modifying the transversal dimensions of the silicon nitride core, it is possible to have a good control of the chromatic dispersion. The inaccuracies due to typical fabrication process in PECD-Si_XN_Y films shows that the dispersion uncertainty is in the order of 20 ps/nm-km at 1550 nm. Silicon nitride waveguides were then fabricated using the same PECVD process and the chromatic dispersion was measured using a low-coherence frequency domain interferometry technique. A comparison between measurements and simulations shows good agreement.

Citation Download Citation

J. M. Chavez Boggio, D. Bodenmueller, T. Fremberg, R. Haynes, M. M. Roth, R. Eisermann, L. Zimmermann, and M. Bohm "Silicon nitride waveguide with flattened chromatic dispersion", Proc. SPIE 8772, Nonlinear Optics and Applications VII, 87720R (8 May 2013); https://doi.org/10.1117/12.2017302

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