Status of multi-beam long trace-profiler development

Mikhail V. Gubarev; Daniel J. Merthe; Kiranmayee Kilaru; Thomas Kester; Brian Ramsey; Wayne R. McKinney; Peter Z. Takacs; A. Dahir; Valeriy V. Yashchuk

doi:10.1117/12.2027146

27 September 2013 Status of multi-beam long trace-profiler development

Mikhail V. Gubarev, Daniel J. Merthe, Kiranmayee Kilaru, Thomas Kester, Brian Ramsey, Wayne R. McKinney, Peter Z. Takacs, A. Dahir, Valeriy V. Yashchuk

Author Affiliations +

Proceedings Volume 8848, Advances in X-Ray/EUV Optics and Components VIII; 88480L (2013) https://doi.org/10.1117/12.2027146
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

The multi-beam long trace profiler (MB-LTP) is under development at NASA’s Marshall Space Flight Center. The traditional LTPs scans the surface under the test by a single laser beam directly measuring the surface figure slope errors. While capable of exceptional surface slope accuracy, the LTP single beam scanning has slow measuring speed. Metrology efficiency can be increased by replacing the single laser beam with multiple beams that can scan a section of the test surface at a single instance. The increase in speed with such a system would be almost proportional to the number of laser beams. The progress for a multi-beam long trace profiler development is presented.

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Mikhail V. Gubarev, Daniel J. Merthe, Kiranmayee Kilaru, Thomas Kester, Brian Ramsey, Wayne R. McKinney, Peter Z. Takacs, A. Dahir, and Valeriy V. Yashchuk "Status of multi-beam long trace-profiler development", Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480L (27 September 2013); https://doi.org/10.1117/12.2027146

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