Tabletop coherent diffraction imaging with a discharge plasma EUV source

Larissa Juschkin; Lars Loetgering; Denis Rudolf; Rui Xu; Sascha Brose; Serhiy Danylyuk; Jianwei Miao

doi:10.1117/12.2023895

30 September 2013 Tabletop coherent diffraction imaging with a discharge plasma EUV source

Larissa Juschkin, Lars Loetgering, Denis Rudolf, Rui Xu, Sascha Brose, Serhiy Danylyuk, Jianwei Miao

Author Affiliations +

Proceedings Volume 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X; 88490Y (2013) https://doi.org/10.1117/12.2023895
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

We present a coherent diffraction imaging (CDI) experiment using a high-frequency discharge plasma based, extreme ultraviolet (EUV) source. By using different illumination geometries, we generated EUV beams witha varying degree of spatial coherence, which were used to produce far field diffraction patterns from test objects. We then successfully reconstructed an illumination wavefront defined by a circular aperture. The present work explores the feasibility of compact tabletop CDI using a discharge plasma EUV source emerged from the technology development of EUV lithography, which can potentially find application in nanoscience and metrology.

Citation Download Citation

Larissa Juschkin, Lars Loetgering, Denis Rudolf, Rui Xu, Sascha Brose, Serhiy Danylyuk, and Jianwei Miao "Tabletop coherent diffraction imaging with a discharge plasma EUV source", Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 88490Y (30 September 2013); https://doi.org/10.1117/12.2023895

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