Industrial Excimer Lasers: Issues And Answers

T A Znotins; B Norris

doi:10.1117/12.944383

12 July 1988 Industrial Excimer Lasers: Issues And Answers

T A Znotins, B Norris

Author Affiliations +

Proceedings Volume 0894, Gas Laser Technology; (1988) https://doi.org/10.1117/12.944383
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

Industrial applications of excimer lasers are expanding rapidly. This trend has led to the evolution of a new generation of excimer lasers designed specifically for industrial usage. This paper reviews some of the issues which need to be addressed in the development of such a laser. Included are market considerations, technology related items and issues related to the laser configuration.

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T A Znotins and B Norris "Industrial Excimer Lasers: Issues And Answers", Proc. SPIE 0894, Gas Laser Technology, (12 July 1988); https://doi.org/10.1117/12.944383

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