GeO2 glass ceramic planar waveguides fabricated by RF-sputtering

A. Chiasera; C. Macchi; S. Mariazzi; S. Valligatla; S. Varas; M. Mazzola; N. Bazzanella; L. Lunelli; C. Pederzolli; D. N. Rao; G. C. Righini; A. Somoza; R. Brusa; M. Ferrari

doi:10.1117/12.2042099

7 March 2014 GeO₂ glass ceramic planar waveguides fabricated by RF-sputtering

A. Chiasera, C. Macchi, S. Mariazzi, S. Valligatla, S. Varas, M. Mazzola, N. Bazzanella, L. Lunelli, C. Pederzolli, D. N. Rao, G. C. Righini, A. Somoza, R. Brusa, M. Ferrari

Author Affiliations +

Proceedings Volume 8982, Optical Components and Materials XI; 89820D (2014) https://doi.org/10.1117/12.2042099
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

GeO₂ transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO₂laser. Different techniques like m-line, micro-Raman spectroscopy, atomic force microscopy, and positronbannihilation spectroscopy were employed to evaluate the effects of CO₂ laser processing on the optical and structuralbproperties of the waveguides. The GeO₂ planar waveguide after 2h of CO₂ laser irradiation exhibits an increase of 0.04 inbthe refractive index, measured at 1542 nm. Moreover, the technique of laser annealing is demonstrated to significantlybreduce propagation loss in GeO₂ planar waveguides due to the reduction of the scattering. Upon irradiation of the surfacebthe roughness decreases from 1.1 to 0.7 nm, as measured by AFM. Attenuation coefficients of 0.7 and 0.5 dB/cm at 1319 and 1542 nm, respectively, were measured after irradiation. Micro-Raman measurements evidence that the system embeds GeO₂ nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 μm thickness.

Citation Download Citation

A. Chiasera, C. Macchi, S. Mariazzi, S. Valligatla, S. Varas, M. Mazzola, N. Bazzanella, L. Lunelli, C. Pederzolli, D. N. Rao, G. C. Righini, A. Somoza, R. Brusa, and M. Ferrari "GeO₂ glass ceramic planar waveguides fabricated by RF-sputtering", Proc. SPIE 8982, Optical Components and Materials XI, 89820D (7 March 2014); https://doi.org/10.1117/12.2042099

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available