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The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. The papers published in these proceedings reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon. Please use the following format to cite material from this book: Author(s), “Title of Paper,” in Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013, edited by Vadim P. Veiko, Tigran A. Vartanyan, Proceedings of SPIE Vol. 9065 (SPIE, Bellingham, WA, 2013) Article CID Number. ISSN: 0277-786X ISBN: 9780819499929 Published by SPIE P.O. Box 10, Bellingham, Washington 98227-0010 USA Telephone +1 360 676 3290 (Pacific Time)· Fax +1 360 647 1445 Copyright © 2013, Society of Photo-Optical Instrumentation Engineers. Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of copying fees. The Transactional Reporting Service base fee for this volume is $18.00 per article (or portion thereof), which should be paid directly to the Copyright Clearance Center (CCC), 222 Rosewood Drive, Danvers, MA 01923. Payment may also be made electronically through CCC Online at copyright.com. Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher. The CCC fee code is 0277-786X/13/$18.00. Printed in the United States of America. Publication of record for individual papers is online in the SPIE Digital Library. Paper Numbering: Proceedings of SPIE follow an e-First publication model, with papers published first online and then in print and on CD-ROM. Papers are published as they are submitted and meet publication criteria. A unique, consistent, permanent citation identifier (CID) number is assigned to each article at the time of the first publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online, print, and electronic versions of the publication. SPIE uses a six-digit CID article numbering system in which:
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IntroductionThis volume presents selected papers of the International Symposium on Fundamentals of Laser-Assisted Micro- and Nanotechnologies (FLAMN-13). This symposium continues in a new format from well-known traditional symposia, ILATA (Intensive Laser Actions and Technological Applications), consisting of LAMN (Laser-Assisted Microtechnologies) and LMI (Laser-Matter Interaction) conferences, originally organized in former Leningrad, USSR since the mid-1960s. Laser-assisted micro- and nanotechnology is one of the first and rapidly growing areas of research, development, and production. The symposium was devoted to the wide spectrum of laser micro– and nanoprocessing, from physical fundamentals of different processes and their experimental demonstration, to the industrial set-ups and their realization. Topics covered by FLAMN–13 included theoretical and experimental aspects of laser-matter interaction applied to laser micro- and nanotechnology. The sessions of FLAMN-13 were visited by over 350 participants including 200 speakers, approximately 80 of them from abroad (Australia, Austria, Belarus, China, France, Germany, Mexico, Hungary, Italy, Japan, Korea, Lithuania, Romania, Spain, Switzerland, United Kingdom, United States). About 225 papers were presented (110 orals, 115 posters); this volume contains 44 selected papers. For convenience of readers, the papers in these proceedings are arranged into six topical sections: Section 1: Laser-matter interaction Section 2: Laser-assisted micro- and nanotechnologies Section 3: Laser-induced phase – structure modification Section 4: Laser cleaning and artworks conservation Section 5: Biomedical laser applications Section 6: Lasers and optics related research. The program committee expresses its gratitude to all the institutions and persons who contributed to organizing, supporting, and holding the conference. Personal thanks to the FLAMN-13 Cooperating and Sponsoring organization Vadim P. Veiko Tigran A. Vartanyan |