The peculiarities of local laser oxidation of metal films

Dmitrii A. Sinev; Elena A. Shakhno; Andrew M. Kulazhkin; Vera A. Kochetova; Andrey D. Kochetov

doi:10.1117/12.2053256

28 November 2013 The peculiarities of local laser oxidation of metal films

Dmitrii A. Sinev, Elena A. Shakhno, Andrew M. Kulazhkin, Vera A. Kochetova, Andrey D. Kochetov

Proceedings Volume 9065, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013; 90650N (2013) https://doi.org/10.1117/12.2053256
Event: Fundamentals of Laser Assisted Micro- and Nanotechnologies 2013, 2013, St. Petersburg, Russian Federation

Abstract

Laser-applied thermochemical modification of thin metal films is the basement for perspective technology writing the submicron structures. Using the materials that are produce the transparent oxides layers during the heating should be perspective for to increase the resolution of this technology, but a detailed study about dependence of the oxidation process on the dynamics of the optical characteristics should be made at first. This article presents an attempt for to creation a new theoretical model, which allows showing in dynamics the process of metal film oxidation by laser pulses.

Citation Download Citation

Dmitrii A. Sinev, Elena A. Shakhno, Andrew M. Kulazhkin, Vera A. Kochetova, and Andrey D. Kochetov "The peculiarities of local laser oxidation of metal films", Proc. SPIE 9065, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013, 90650N (28 November 2013); https://doi.org/10.1117/12.2053256

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