Approach of pullulan derivatives to resist polymers for green lithography in eco-friendly optical NEMS and MEMS

Satoshi Takei; Akihiro Oshima; Kenta Ito; Kigenn Sugahara; Miki Kashiwakura; Tomoko G. Oyama; Takahiro Kozawa; Seiichi Tagawa; Makoto Hanabata

doi:10.1117/12.2045636

2 May 2014 Approach of pullulan derivatives to resist polymers for green lithography in eco-friendly optical NEMS and MEMS

Satoshi Takei, Akihiro Oshima, Kenta Ito, Kigenn Sugahara, Miki Kashiwakura, Tomoko G. Oyama, Takahiro Kozawa, Seiichi Tagawa, Makoto Hanabata

Author Affiliations +

Proceedings Volume 9130, Micro-Optics 2014; 913011 (2014) https://doi.org/10.1117/12.2045636
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

This presentation reported an approach of glucose derivatives to resist polymers for eco-friendly optical NEMS and MEMS. The material design concept to use the water-soluble resist material with highly efficient crosslinking, water development, and lower film thickness shrinkage was proposed for green lithography. The lithographic properties due to the glucose derivatives, and the low film thickness shrinkage due to distinctive bulky chemical structure were proposed in the resist material, and then demonstrated to be effective for creating high resolution, excellent patterning dimensional accuracy, and low line edge roughness in EB lithography. Mixing or blending of glucose and cellulose derivatives was a valuable approach to the design of resist formulations for eco-friendly optical NEMS and MEMS.

Citation Download Citation

Satoshi Takei, Akihiro Oshima, Kenta Ito, Kigenn Sugahara, Miki Kashiwakura, Tomoko G. Oyama, Takahiro Kozawa, Seiichi Tagawa, and Makoto Hanabata "Approach of pullulan derivatives to resist polymers for green lithography in eco-friendly optical NEMS and MEMS", Proc. SPIE 9130, Micro-Optics 2014, 913011 (2 May 2014); https://doi.org/10.1117/12.2045636

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available