Automated Data Acquisition For Reduction Stepper Maintenance Control

W. Stevenson; J. Lin; M. Zarringhalam; S. Hoeker; S. Lyle; J. Hughes

doi:10.1117/12.968383

1 January 1988 Automated Data Acquisition For Reduction Stepper Maintenance Control

W. Stevenson, J. Lin, M. Zarringhalam, S. Hoeker, S. Lyle, J. Hughes

Proceedings Volume 0921, Integrated Circuit Metrology, Inspection, and Process Control II; (1988) https://doi.org/10.1117/12.968383
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

Reduction steppers require the performance of several diagnostic tests to ensure that their performance meets product specifications. This is no less important at periodic inspections, than it was at the time of initial equipment acceptance. We have implemented an automated monitoring program in which stage stepping precision, array orthogonality, reticle rotation, magnification control, lens distortion, global alignment accuracy, field-by-field alignment accuracy, enhanced global alignment accuracy and resolution are inspected weekly as a part of our preventive maintenance program. With automated data collection, this task takes approximately four hours per machine per week. The results are obtained much faster and more accurately than could be done by manual data collection. Thus the implementation of an automated reduction stepper performance monitor within our manufacturing facility has increased our control over stepper parametric monitoring and has allowed us to utilize our technical resources more efficiently.

Citation Download Citation

W. Stevenson, J. Lin, M. Zarringhalam, S. Hoeker, S. Lyle, and J. Hughes "Automated Data Acquisition For Reduction Stepper Maintenance Control", Proc. SPIE 0921, Integrated Circuit Metrology, Inspection, and Process Control II, (1 January 1988); https://doi.org/10.1117/12.968383

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