Fast axis servo for the fast and precise machining of non-rotational symmetric optics

Fujing Tian; Ziqiang Yin; Shengyi Li

doi:10.1117/12.2067863

6 August 2014 Fast axis servo for the fast and precise machining of non-rotational symmetric optics

Fujing Tian, Ziqiang Yin, Shengyi Li

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 928103 (2014) https://doi.org/10.1117/12.2067863
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

A new long range tool servo-fast axis servo is developed, which is used for fabricating the non-rotational symmetric optics surface with millimeters’ sag. The mechanism design, motion modeling and development of FAS device were studied. The FAS consists of a linear motor, aerostatic bearings, high-resolution encoder and a motion controller. A control strategy consists of a proportional, integral and derivative (PID) feedback controller and velocity/acceleration feedforward controller is implemented to accommodate the system control performance. Experimental tests have been carried out to verify the performance of the FAS system.

Citation Download Citation

Fujing Tian, Ziqiang Yin, and Shengyi Li "Fast axis servo for the fast and precise machining of non-rotational symmetric optics", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 928103 (6 August 2014); https://doi.org/10.1117/12.2067863

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