Signal processing for single grating displacement measurement based on 3×3 coupler

Chunhua Wei; Shuhua Yan; Cunbao Lin; Guochao Wang

doi:10.1117/12.2180922

6 March 2015 Signal processing for single grating displacement measurement based on 3×3 coupler

Chunhua Wei, Shuhua Yan, Cunbao Lin, Guochao Wang

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 944625 (2015) https://doi.org/10.1117/12.2180922
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

We present a compact displacement measurement system based on single grating and 3×3 coupler, possessing the capability of large range and nanometer precision. With the introduction of 3×3 coupler for phase shift in interference signal, the present scheme has the advantages of simple structure, convenient alignment, and insensitivity to air turbulence, resulting in high robustness. We accordingly developed an efficient and precision signal processing method for phase demodulation on a digital signal processing, adapting to characteristics of outputs in 3×3 coupler, achieving a high-powered subdivision of the interference phase. It was validated that the phase precision was about 1^° even when phase and amplitude errors were added to interference signals in the simulation, which corresponded to a displacement precision of about 3nm.

Citation Download Citation

Chunhua Wei, Shuhua Yan, Cunbao Lin, and Guochao Wang "Signal processing for single grating displacement measurement based on 3×3 coupler", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944625 (6 March 2015); https://doi.org/10.1117/12.2180922

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available