Paper
19 February 2015 Optimization and analysis of near-infrared InGaAs detectors
Qingsong Wang, Jun Chen, Jiabing Lv, Mingxiang Wang, Xue Li, Hengjing Tang
Author Affiliations +
Proceedings Volume 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014); 94491Q (2015) https://doi.org/10.1117/12.2083191
Event: The International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference (icPOE 2014), 2014, Xi'an, China
Abstract
Back-illuminated near-infrared detectors were designed and fabricated using p-InGaAs/p-InP/i-InGaAs/n-InP p-i-n layer structure. In order to optimize the detector layer structure, the device was simulated by drift-diffusion simulator “SimWindows” first, and then the epitaxy material was grown by metal organic chemical vapor deposition (MOCVD). The current-voltage characteristics of the fabricated detectors with and without light were investigated respectively. The results show that the responsivity of the detectors is around 0.7 A/W, and the dark current is about 1×10-4 A/cm2 at reverse bias 0.1V, both of which are comparable to the simulated results. Our results also show the smaller detector has better dark current density, and the dominated mechanisms of dark current are discussed in the paper.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qingsong Wang, Jun Chen, Jiabing Lv, Mingxiang Wang, Xue Li, and Hengjing Tang "Optimization and analysis of near-infrared InGaAs detectors", Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94491Q (19 February 2015); https://doi.org/10.1117/12.2083191
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KEYWORDS
Sensors

Indium gallium arsenide

Photodetectors

Back illuminated sensors

Metalorganic chemical vapor deposition

Absorption

Infrared imaging

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