D. Pla,1 M. Salleras,2 I. Garbayo,1 A. Morata,1 N. Sabaté,2 N. J. Divins,3 J. Llorca,3 A. Tarancón1
1Institut de Recerca en Energia de Catalunya (Spain) 2Instituto de Microelectrónica de Barcelona, Ctr. Nacional de Microelectrónica, CSIC (Spain) 3Univ. Politècnica de Catalunya (Spain)
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A novel design of a fuel-flexible micro-reactor for hydrogen generation from ethanol and methane is proposed in this
work. The micro-reactor is fully fabricated with mainstream MEMS technology and consists of an array of more than
20000 through-silicon vertically aligned micro-channels per cm2 of 50 μm in diameter. Due to this unique configuration,
the micro-reformer presents a total surface per projected area of 16 cm2/cm2 and per volume of 320 cm2/cm3. The active
surface of the micro-reformer, i.e. the walls of the micro-channels, is homogenously coated with a thin film of Rh-
Pd/CeO2 catalyst. Excellent steam reforming of ethanol and dry reforming of methane are presented with hydrogen
production rates above 3 mL/min·cm2 and hydrogen selectivity of ca. 50% on a dry basis at operations conditions
suitable for application in micro-solid oxide fuel cells (micro-SOFCs), i.e. 700-800ºC and fuel flows of 0.02 mLL/min for
ethanol and 36 mLG/min for methane (corresponding to a system able to produce one electrical watt).
D. Pla,M. Salleras,I. Garbayo,A. Morata,N. Sabaté,N. J. Divins,J. Llorca, andA. Tarancón
"Fabrication and characterization of a fuel flexible micro-reformer fully integrated in silicon for micro-solid oxide fuel cell applications", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172D (21 May 2015); https://doi.org/10.1117/12.2178860
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D. Pla, M. Salleras, I. Garbayo, A. Morata, N. Sabaté, N. J. Divins, J. Llorca, A. Tarancón, "Fabrication and characterization of a fuel flexible micro-reformer fully integrated in silicon for micro-solid oxide fuel cell applications," Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172D (21 May 2015); https://doi.org/10.1117/12.2178860