Paper
17 July 2015 The design and fabrication of common optical components lithography lens
Author Affiliations +
Proceedings Volume 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015); 95240P (2015) https://doi.org/10.1117/12.2186932
Event: International Conference on Optical and Photonic Engineering (icOPEN2015), 2015, Singapore, Singapore
Abstract
The design and fabrication of common optical components lithography Lens has been carried out for a 1 to 1 stepper. The specification of lens is fulfilled the 3-D lithography system as 2 micron in resolution for 1 inch x 2.8 inches system. The lens has been sophistically designed by dual path in a triplet to reduce the number of components. A single aspherical surface has been applied to reduce the aberration to diffraction limit in lens. The well-made shapes of lens have been suggested. Then, the fabrication of lens has been in the process. Finally, the optical axis of tolerance optical mechanical mountings for lens system in assembly has been analyzed, and valuable for assembly and fabrication.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jiun-Woei Huang "The design and fabrication of common optical components lithography lens", Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 95240P (17 July 2015); https://doi.org/10.1117/12.2186932
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KEYWORDS
Lens design

Aspheric lenses

Modulation transfer functions

Lithography

Optical components

Mirrors

Tolerancing

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