Novel dispersion tolerant interferometry method for accurate measurements of displacement

Adrian Bradu; Michael Maria; Lasse Leick; Adrian Gh. Podoleanu

doi:10.1117/12.2184858

22 June 2015 Novel dispersion tolerant interferometry method for accurate measurements of displacement

Adrian Bradu, Michael Maria, Lasse Leick, Adrian Gh. Podoleanu

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 952509 (2015) https://doi.org/10.1117/12.2184858
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

We demonstrate that the recently proposed master-slave interferometry method is able to provide true dispersion free depth profiles in a spectrometer-based set-up that can be used for accurate displacement measurements in sensing and optical coherence tomography. The proposed technique is based on correlating the channelled spectra produced by the linear camera in the spectrometer with previously recorded masks. As such technique is not based on Fourier transformations (FT), it does not require any resampling of data and is immune to any amounts of dispersion left unbalanced in the system. In order to prove the tolerance of technique to dispersion, different lengths of optical fiber are used in the interferometer to introduce dispersion and it is demonstrated that neither the sensitivity profile versus optical path difference (OPD) nor the depth resolution are affected. In opposition, it is shown that the classical FT based methods using calibrated data provide less accurate optical path length measurements and exhibit a quicker decays of sensitivity with OPD.

Citation Download Citation

Adrian Bradu, Michael Maria, Lasse Leick, and Adrian Gh. Podoleanu "Novel dispersion tolerant interferometry method for accurate measurements of displacement", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 952509 (22 June 2015); https://doi.org/10.1117/12.2184858

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