Nanoindentation for surface modification of nanofilms

A. I. Luchenko; M. M. Melnichenko

doi:10.1117/12.2187573

20 August 2015 Nanoindentation for surface modification of nanofilms

A. I. Luchenko, M. M. Melnichenko

Proceedings Volume 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII; 955619 (2015) https://doi.org/10.1117/12.2187573
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

In the work it is shown practical use of a scanning tunneling microscope for indentation in the continuous micro- and nano-range. A maximum load of 2.64 cN (and 0.4 cN minimum) was applied on a piezo-scanner to achieve the indentation. The relaxation changes of modified surface by contact method was investigated. It is shown that within a few hours of modification there is clear evidence of inevitable loss of information about the morphology of initially modified area. The possibility of modifying the sample surface by tunneling current was shown. This may enable preparation of the surface for subsequent applications in which it is necessary to reduce the average irregularities of the surface. Nano-objects on the surface of the experimental samples were created by using the developed method.

Citation Download Citation

A. I. Luchenko and M. M. Melnichenko "Nanoindentation for surface modification of nanofilms", Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 955619 (20 August 2015); https://doi.org/10.1117/12.2187573

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