Two-dimensional differential deposition: figure correction of thin-shell mirror substrates for x-ray astronomy

David L. Windt; Ray Conley Jr.

doi:10.1117/12.2188135

4 September 2015 Two-dimensional differential deposition: figure correction of thin-shell mirror substrates for x-ray astronomy

David L. Windt, Ray Conley Jr.

Author Affiliations +

Proceedings Volume 9603, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII; 96031H (2015) https://doi.org/10.1117/12.2188135
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

This paper describes a new variation of the differential deposition/differential erosion technique for mid-frequency surface-height error correction. In our approach, the technique is extended to two dimensions in order to correct surfaceheight errors in thin-shell cylindrical mirror segments with high throughput. We describe the new infrastructure currently being developed to realize this technique, including an LTP system for surface metrology of mid-frequency surfaceheight errors, a new UHV linear stage for precise substrate motion during deposition or erosion, and most crucially, the development of electronically-actuated aperture arrays that are mounted in front of a rectangular magnetron cathode, or a rectangular ion source, in order to modulate the deposition/erosion rate of material in two dimensions, in real-time.

Citation Download Citation

David L. Windt and Ray Conley Jr. "Two-dimensional differential deposition: figure correction of thin-shell mirror substrates for x-ray astronomy", Proc. SPIE 9603, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII, 96031H (4 September 2015); https://doi.org/10.1117/12.2188135

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