Ultra-precision deterministic processing algorithm and experiment research of FJP

Zongfu Guo; Tan Jin; Li Ping; Ange Li; Meina Qu

doi:10.1117/12.2242267

28 October 2016 Ultra-precision deterministic processing algorithm and experiment research of FJP

Zongfu Guo, Tan Jin, Li Ping, Ange Li, Meina Qu

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96830K (2016) https://doi.org/10.1117/12.2242267
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

During the deterministic processing, dwell time map is the precondition to achieve the high precision surface. It is very important to obtain V-like shape removal function for the dwell time computation when using the numerical iteration method. As one of the ultra-precision polishing method, Fluid jet polishing (FJP) has been used widely in optical fabrication. But the shape of removal function of existing vertical jet polishing is W like. So, eccentric rotation jet device was usually used to correct the shape of remove function from W-like to V-like shape. In this paper, we put forward a concept of rotary function, and its can take the place of eccentric rotary device to achieve faster solve of dwell time and make the equipment structure simplify. We also put forward the layer by layer dwell time computation method and efficiently avoid the convergence failure.

Citation Download Citation

Zongfu Guo, Tan Jin, Li Ping, Ange Li, and Meina Qu "Ultra-precision deterministic processing algorithm and experiment research of FJP", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96830K (28 October 2016); https://doi.org/10.1117/12.2242267

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