Subwavelength grating waveguide-integrated athermal Mach-Zehnder interferometer with enhanced fabrication error tolerance and wide stable spectral range

Peng Xing; Jaime Viegas

doi:10.1117/12.2214101

18 March 2016 Subwavelength grating waveguide-integrated athermal Mach-Zehnder interferometer with enhanced fabrication error tolerance and wide stable spectral range

Peng Xing, Jaime Viegas

Author Affiliations +

Proceedings Volume 9752, Silicon Photonics XI; 97520U (2016) https://doi.org/10.1117/12.2214101
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

We propose an athermal Mach-Zehnder interferometer (MZI) with a subwavelength grating waveguide implemented in one of the arms to increase its fabrication error tolerance. The design is demonstrated with a CMOS compatible fabrication. In this work we will discuss the design principles of the subwavelength grating, loss mechanism, fabrication procedure and experimental results obtained. The fabricated devices have a temperature sensitivity of less than 10 pm/K over a spectral range from 1.5μm to 1.64μm. Also, the fabricated devices have a stable performance within the aforementioned specifications even with fabrication linewidth variations from -20 nm to 40 nm.

Citation Download Citation

Peng Xing and Jaime Viegas "Subwavelength grating waveguide-integrated athermal Mach-Zehnder interferometer with enhanced fabrication error tolerance and wide stable spectral range", Proc. SPIE 9752, Silicon Photonics XI, 97520U (18 March 2016); https://doi.org/10.1117/12.2214101

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