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18 August 2016 Front Matter: Volume 9760
Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 976001 (2016) https://doi.org/10.1117/12.2240460
Event: SPIE OPTO, 2016, San Francisco, California, United States
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 9760, including the Title Page, Copyright information, Table of Contents, Introduction (if any), and Conference Committee listing.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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"Front Matter: Volume 9760", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 976001 (18 August 2016); https://doi.org/10.1117/12.2240460
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KEYWORDS
Microopto electromechanical systems
Imaging systems
Microelectromechanical systems
3D surface sensing
Current controlled current source
Mirrors
Optical filters
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