Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 9868, including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 9868", Proc. SPIE 9868, Dimensional Optical Metrology and Inspection for Practical Applications V, 986801 (28 September 2016); https://doi.org/10.1117/12.2244097
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KEYWORDS
Optical metrology

3D metrology

Imaging systems

3D image processing

Computing systems

Current controlled current source

Inspection

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