Mach–Zehnder-type white light interferometer through tunable-path-difference source

Jaeheung Kim; Sang Min Park; Gyeong Hun Kim; Chang-Seok Kim

doi:10.1117/12.2609275

5 March 2022 Mach–Zehnder-type white light interferometer through tunable-path-difference source

Jaeheung Kim, Sang Min Park, Gyeong Hun Kim, Chang-Seok Kim

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Proceedings Volume PC12008, Photonic Instrumentation Engineering IX; PC1200803 (2022) https://doi.org/10.1117/12.2609275
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

A novel scheme of white light interferometer (WLI) surface imaging system is demonstrated using a tunable-path-difference source (TPDS). TPDS is applied by adopting Mach–Zehnder interferometry to resolve the vibration noise, which the mechanical scanning has caused in the reference path of conventional WLI. Compared with WLI using comb-spacing-swept source (CSWS), WLI with TPDS is superior in terms of signal-to-noise ratio and total exposure of optical intensity into the camera. Through the improved performance, WLI with TPDS can successfully acquire 3D images at the micron scale and multi-layered tomographic information with fine detail.

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Jaeheung Kim, Sang Min Park, Gyeong Hun Kim, and Chang-Seok Kim "Mach–Zehnder-type white light interferometer through tunable-path-difference source", Proc. SPIE PC12008, Photonic Instrumentation Engineering IX, PC1200803 (5 March 2022); https://doi.org/10.1117/12.2609275

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KEYWORDS

Interferometers

Signal to noise ratio

Light

Telescopic pixel displays

3D image processing

Imaging systems

3D acquisition

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