PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
Kenji Yasui,Mayuka Osaki,Hitoshi Namai,Yuki Ojima,Masami Ikota, andMaki Tanaka
"A method for quantifying the three-dimensional shape of circuit patterns with a top-down CD-SEM image", Proc. SPIE PC12053, Metrology, Inspection, and Process Control XXXVI, PC120530R (13 June 2022); https://doi.org/10.1117/12.2614738
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Kenji Yasui, Mayuka Osaki, Hitoshi Namai, Yuki Ojima, Masami Ikota, Maki Tanaka, "A method for quantifying the three-dimensional shape of circuit patterns with a top-down CD-SEM image," Proc. SPIE PC12053, Metrology, Inspection, and Process Control XXXVI, PC120530R (13 June 2022); https://doi.org/10.1117/12.2614738