InGaP Geiger-mode avalanche photodiode photon counting arrays for airborne remote sensing applications

Ping Yuan

doi:10.1117/12.2618981

30 May 2022 InGaP Geiger-mode avalanche photodiode photon counting arrays for airborne remote sensing applications

Ping Yuan

Author Affiliations +

Proceedings Volume PC12110, Laser Radar Technology and Applications XXVII; PC1211001 (2022) https://doi.org/10.1117/12.2618981
Event: SPIE Defense + Commercial Sensing, 2022, Orlando, Florida, United States

Abstract

Acqubit has been developing GaInP GmAPD photon counting arrays using a back-side illuminated homojunction InGaP mesa design. Both single element and 32 x 32 arrays GaInP GmAPDs have been designed, fabricated, and tested. We observed low dark current density of 0.32 uA/cm2 before breakdown and a dark count rate of ~ 10 kHz at 3.5 V overbias at room temperature for a 50-micron device. Furthermore, we obtained a quantum efficiency (QE) of about 55% at 520 nm without a bottom reflector. The combination of mesa structure and removal of the substrate greatly suppresses pixel crosstalk while maintaining a high QE and photon detection efficiency (PDE). We have built focal plane arrays using 32x32 GaInP arrays integrated with read-out integrated circuits (ROICs). Furthermore, we removed the GaAs substrate for backside illumination and demonstrated good QE. We integrated SiO2 micro lens arrays for improved optical fill factor.

Conference Presentation

Citation Download Citation

Ping Yuan "InGaP Geiger-mode avalanche photodiode photon counting arrays for airborne remote sensing applications", Proc. SPIE PC12110, Laser Radar Technology and Applications XXVII, PC1211001 (30 May 2022); https://doi.org/10.1117/12.2618981

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