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17 March 2023 Applications of pump modulated UV supercontinuum
Asbjørn Moltke, Jonas S. Madsen, Callum R. Smith, Rasmus D. Engelsholm, Erik N. Christensen, Mattia Michieletto, Jürgen Appel, Anders Brusch, Christian R. Petersen, Poul Erik Hansen, Christos Markos, Patrick B. Montague, Ole Bang
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Proceedings Volume PC12405, Nonlinear Frequency Generation and Conversion: Materials and Devices XXII; PC1240507 (2023) https://doi.org/10.1117/12.2649984
Event: SPIE LASE, 2023, San Francisco, California, United States
Abstract
UV supercontinuum based on gas filled anti resonant hollow core fibers is demonstrated to have passed a major milestone by providing spectral properties comparable to those of plasma arc lamps, namely a broad, flat, low noise, and stable spectrum. The primary advancement is the use of pump modulation which flattens the spectrum by more than 20dB. As proof of concept, results from scatterometry measurements, with both UV supercontinuum and plasma arc lamps are shown to produce comparable results. However, UV supercontinuum can meet additional requirements making it suitable for many cutting-edge UV metrology applications such as imaging and spectroscopy.
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Asbjørn Moltke, Jonas S. Madsen, Callum R. Smith, Rasmus D. Engelsholm, Erik N. Christensen, Mattia Michieletto, Jürgen Appel, Anders Brusch, Christian R. Petersen, Poul Erik Hansen, Christos Markos, Patrick B. Montague, and Ole Bang "Applications of pump modulated UV supercontinuum", Proc. SPIE PC12405, Nonlinear Frequency Generation and Conversion: Materials and Devices XXII, PC1240507 (17 March 2023); https://doi.org/10.1117/12.2649984
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KEYWORDS
Ultraviolet radiation
Modulation
Imaging spectroscopy
Lamps
Plasma
Light sources
Metrology
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