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4 October 2023 Vertical MIM metamaterial absorber for IR spectroscopic detection of gas molecules
Takuo Tanaka
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Proceedings Volume PC12646, Metamaterials, Metadevices, and Metasystems 2023; PC1264608 (2023) https://doi.org/10.1117/12.2676181
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States
Abstract
We propose a metamaterial absorber with a three-dimensional, vertically-oriented metal-insulator-metal (v-MIM) structure for ultra-sensitive infrared spectroscopic gas sensing. The small footprint of the v-MIM structure allows for increased integration density of the MIM structure, resulting in the detection of gas molecules with suppressed background light. We designed and fabricated the v-MIM structure and used it to detect carbon dioxide and butane molecules. The mutual coupling of the vibration of the molecules and the resonant mode of v-MIM creates a Fano resonance, and their distinct peaks are clearly observed in the corresponding transmission dips.
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Takuo Tanaka "Vertical MIM metamaterial absorber for IR spectroscopic detection of gas molecules", Proc. SPIE PC12646, Metamaterials, Metadevices, and Metasystems 2023, PC1264608 (4 October 2023); https://doi.org/10.1117/12.2676181
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KEYWORDS
Infrared spectroscopy
Metamaterials
Molecules
Molecular spectroscopy
Infrared detectors
Absorption spectroscopy
Spectroscopy
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