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12 March 2024 Imaging mmWave propagation on wafer
Bryan Bosworth, Nick Jungwirth, Jerome Cheron, Franklyn Quinlan, Nathan Orloff, Christian Long, Ari Feldman
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Proceedings Volume PC12885, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVII; PC128850C (2024) https://doi.org/10.1117/12.3002286
Event: SPIE OPTO, 2024, San Francisco, California, United States
Abstract
We demonstrate an electro-optic imaging system for measuring millimeter-wave propagation along a coplanar waveguide (CPW). A polarization-resolved microscope images small electro-optic effects due to millimeter-wave voltages between the signal and ground of the CPW. Dual electro-optic frequency combs demonstrate time-domain waveform imaging on-wafer with >100 GHz of bandwidth. A second configuration demonstrates continuous wave optically-derived vector network analysis with measurement planes on-wafer, filling the role of multiple electronic network analyzers but with instantaneous bandwidth and time-domain capability that cannot be achieved otherwise.
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Bryan Bosworth, Nick Jungwirth, Jerome Cheron, Franklyn Quinlan, Nathan Orloff, Christian Long, and Ari Feldman "Imaging mmWave propagation on wafer", Proc. SPIE PC12885, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVII, PC128850C (12 March 2024); https://doi.org/10.1117/12.3002286
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KEYWORDS
Semiconducting wafers
Wave propagation
Laser frequency
Electro optics
Network security
Microscopes
Photodiodes
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