Author Affiliations +
Robert Browning,1 Shurong Liang,2 Peter Sun,1 Laxmy Menon,1 Nadjoua Moumen,1 Can Guven,1 Nathan Strutt,1 Mehmet Aykol,1 Robert Bigwood,1 Sarah Williams,1 Kevin Anglin,2 Amol Gupta,2 Steven Sherman,2 Kevin Fischer,1 Charles Wallace,1 Gang Shu,3 Bhavin Shah,3 Brad Taylor3
1Intel Corp. (United States)
2Applied Materials, Inc. (United States)
3Applied Materials (United States)