Presentation
20 June 2024 Stable LIPSS Formation on Transparent Materials by Data-Driven Ultrashort Pulse Laser Processing
Author Affiliations +
Abstract
Ultrashort pulse (USP) laser processing has great potential for precise microfabrication. Toward higher quality and productivity, we have developed the data-driven USP laser processing in which process parameters can be controlled based on data such as in-process monitoring and artificial intelligence (AI) optimization. In this work, stable formation of laser-induced periodic surface structure (LIPSS) in nanoscale on transparent glass materials has been demonstrated by the data-driven UPS laser processing.
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Aiko Narazaki, Takemichi Miyoshi, Hideyuki Takada, Dai Yoshitomi, and Godai Miyaji "Stable LIPSS Formation on Transparent Materials by Data-Driven Ultrashort Pulse Laser Processing", Proc. SPIE PC13005, Laser + Photonics for Advanced Manufacturing , PC130050K (20 June 2024); https://doi.org/10.1117/12.3016552
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KEYWORDS
Laser processing

Ultrafast phenomena

Artificial intelligence

Laser development

Laser nanostructuring

Materials properties

Microfabrication

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