Optimizing multi-wavelength extreme ultraviolet ptychography through structured illumination

Antonios Pelekanidis; Fengling Zhang; Matthias Gouder; Kjeld S. E. Eikema; Stefan M. Witte

doi:10.1117/12.3022842

18 June 2024 Optimizing multi-wavelength extreme ultraviolet ptychography through structured illumination

Antonios Pelekanidis, Fengling Zhang, Matthias Gouder, Kjeld S. E. Eikema, Stefan M. Witte

Proceedings Volume PC13023, Computational Optics 2024; PC1302308 (2024) https://doi.org/10.1117/12.3022842
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

Ptychography with multiplexed data is, although feasible, a challenging task if there is a lack of diversity in the measured diffraction patterns. A practical way to improve diversity is through structuring the incident light field. However, there is no metric that quantifies the influence of beam structuring in ptychography. In this work, we propose the use of Jensen Shannon divergence (JSD) as a metric of the diversity in the diffraction patterns that a structured beam can provide between scan positions or between monochromatic contributions in a multi-wavelength HHG beam. We compare the JSD of different types of beams (Gaussian, structured and OAM) illuminating a standard binary USAF resolution target with the achieved resolution of the object under similar experimental conditions. The findings of this comparison indicate that multi-wavelength beams that provide a higher JSD lead to more robust reconstructions and higher object resolution.

Conference Presentation

Citation Download Citation

Antonios Pelekanidis, Fengling Zhang, Matthias Gouder, Kjeld S. E. Eikema, and Stefan M. Witte "Optimizing multi-wavelength extreme ultraviolet ptychography through structured illumination", Proc. SPIE PC13023, Computational Optics 2024, PC1302308 (18 June 2024); https://doi.org/10.1117/12.3022842

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