Three-dimensional microwave kinetic inductance detectors

Nicholas F. Cothard; Thomas Stevenson; Christine Jhabvala; Jason Glenn

doi:10.1117/12.3019177

17 August 2024 Three-dimensional microwave kinetic inductance detectors

Nicholas F. Cothard, Thomas Stevenson, Christine Jhabvala, Jason Glenn

Author Affiliations +

Proceedings Volume PC13102, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XII; PC131020N (2024) https://doi.org/10.1117/12.3019177
Event: SPIE Astronomical Telescopes + Instrumentation, 2024, Yokohama, Japan

Abstract

We present the design and optical characterization of a novel highly compact three-dimensional microwave kinetic inductance detector (3D-MKID). At short wavelengths, such as the far- and mid-infrared, the pixel density of MKID arrays is often limited by the size and geometry of each resonator’s capacitor. Sending the non-optically active component of the resonator into the third dimension minimizes the footprint of each pixel, allowing much higher array densities to be achieved. In our 3D-MKID design, we compactify the resonator by conformally coating deep-etched holes in the silicon substrate with superconducting films formed by atomic layer deposition. The resulting geometry consists of three-dimensional coaxial transmission lines, which are then connected to a meandered absorber on the substrate surface. An array of these resonators are capacitively coupled to a microstrip feedline. We present the characterization of a prototype 3D-MKID array and compare it to simulate resonator properties. We additionally describe the detector sensitivity performance when illuminated by a far-infrared blackbody source.

Conference Presentation

Citation Download Citation

Nicholas F. Cothard, Thomas Stevenson, Christine Jhabvala, and Jason Glenn "Three-dimensional microwave kinetic inductance detectors", Proc. SPIE PC13102, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XII, PC131020N (17 August 2024); https://doi.org/10.1117/12.3019177

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