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We design, fabricate and measure transmissive dielectric metasurfaces made of high-aspect-ratio, wide-bandgap oxide materials to achieve λ/4 retardance at deep ultraviolet wavelengths. We optimize the design towards a broadband quarter-wave plate for ultrafast pulses while being resistant to high-power lasers. We also test the damage threshold of the fabricated metasurfaces to evaluate the efficacy of various oxide materials in comparison to each other and bulk conventional optics. Our work could pave the way towards further development of transmissive DUV optical elements with customized functionalities and their integration into more complex systems for spatiotemporal shaping of DUV pulses.
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Shatha Kaassamani, Kyle Chapkin, Dhruv Fomra, Junyeob Song, Amit Agrawal, Henri Lezec, Wenqi Zhu, "Transmissive metasurface-based quarter-wave plates for few-femtosecond pulses at deep ultraviolet wavelengths," Proc. SPIE PC13190, Laser-Induced Damage in Optical Materials 2024, PC131900I (18 December 2024); https://doi.org/10.1117/12.3033010