Single-shot surface profiling by multiwavelength interferometry without carrier fringe introduction

Katsuichi Kitagawa

doi:10.1117/1.JEI.21.2.021107

10 May 2012 Single-shot surface profiling by multiwavelength interferometry without carrier fringe introduction

Katsuichi Kitagawa

Author Affiliations +

Journal of Electronic Imaging, Vol. 21, Issue 2, 021107 (May 2012). https://doi.org/10.1117/1.JEI.21.2.021107

Abstract

As a single-shot interferometric technique, spatial carrier interferometry has been thoroughly investigated, and it has been shown to have some problems, such as low spatial resolution. To overcome the problems, we propose a novel single-shot surface profiling technique that does not require carrier introduction. It is based on a model-fitting algorithm and estimates the model parameters and the heights of plural points simultaneously based on their multiwavelength intensity data. The validity of the proposed method is demonstrated by computer simulations and actual experiments.

Citation Download Citation

Katsuichi Kitagawa "Single-shot surface profiling by multiwavelength interferometry without carrier fringe introduction," Journal of Electronic Imaging 21(2), 021107 (10 May 2012). https://doi.org/10.1117/1.JEI.21.2.021107

Published: 10 May 2012

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