Parameter extraction of MEMS comb-drive near-resonance equivalent circuit: physically-based technique for a unique solution

Yasser M. Sabry; Mostafa Medhat; Bassam Saadany; Diaa Khalil; Tarik Bourouina

doi:10.1117/1.JMM.11.2.021205

7 May 2012 Parameter extraction of MEMS comb-drive near-resonance equivalent circuit: physically-based technique for a unique solution

Yasser M. Sabry, Mostafa Medhat, Bassam Saadany, Diaa Khalil, Tarik Bourouina

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 2, 021205 (May 2012). https://doi.org/10.1117/1.JMM.11.2.021205

Abstract

A new extraction approach for MEMS comb-drive equivalent circuit parameters is presented. The proposed method eliminates the need for fitting and optimization by direct extraction from the measured data and, thus, avoids the nonuniqueness problem associated with fitting algorithms. A silicon-on-insulator-based MEMS comb-drive actuator is designed, fabricated, and measured, and its equivalent circuit is obtained by the proposed procedure. Analytical estimation for the uncertainty in the extracted values due to the discrete nature of the measurement frequency resolution is carried out. Uncertainty in the extracted values of the equivalent motional parameters is well below 0.6% when a 0.1-Hz frequency resolution is used. The method has been used to extract the resonator quality factor at both atmospheric and vacuum operations and can be extended to other types of resonators.

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Yasser M. Sabry, Mostafa Medhat, Bassam Saadany, Diaa Khalil, and Tarik Bourouina "Parameter extraction of MEMS comb-drive near-resonance equivalent circuit: physically-based technique for a unique solution," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(2), 021205 (7 May 2012). https://doi.org/10.1117/1.JMM.11.2.021205

Published: 7 May 2012

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