Microassembly process to fabricate a microoptoelectromechanical systems scanning mirror with angular vertical comb electrodes

Min-Ho Jun; Seunghwan Moon; Jong-Hyun Lee

doi:10.1117/1.JMM.12.1.013006

1 February 2013 Microassembly process to fabricate a microoptoelectromechanical systems scanning mirror with angular vertical comb electrodes

Min-Ho Jun, Seunghwan Moon, Jong-Hyun Lee

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 1, 013006 (February 2013). https://doi.org/10.1117/1.JMM.12.1.013006

Abstract

We present a simple microassembly technology that easily realizes angular vertical combs for a microoptoelectromechanical systems scanner. The scanner is composed of a device section with comb electrodes and a tilting section with four tapered pillars. During the microassembly process, two tilting pillars push down the levers so that the comb electrodes connected with the micromirror are tilted; the other two alignment pillars fit into the alignment holes of the device section, which is fabricated via a deep reactive ion etching process of a silicon-on-insulator wafer. The tilting section is fabricated through a series of anisotropic wet etching of a (100) silicon wafer and patterning processes of SU-8, which is robust enough to ensure repeatability of the initial tilted angles of the movable comb electrodes. The pull-in investigation function is analyzed through a numerical estimation to obtain a large scan angle with stable behavior. The fabricated microscanner shows an optical scan angle of up to 4.23 deg at 90 V in the static mode and stable actuation of up to 11.3 deg at a resonant frequency of 2.87 kHz. The roughness of the mirror surface is less than 10 nm, which will have a negligible effect on imaging quality. The initial tilted angles in the microassembly process showed high repeatability within 10% error.

Citation Download Citation

Min-Ho Jun, Seunghwan Moon, and Jong-Hyun Lee "Microassembly process to fabricate a microoptoelectromechanical systems scanning mirror with angular vertical comb electrodes," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(1), 013006 (1 February 2013). https://doi.org/10.1117/1.JMM.12.1.013006

Published: 1 February 2013

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE