Improving thin-film zinc-oxide surface acoustic wave device insertion loss using a grooved reflective grating structure

I-Yu Huang; Chang-Yu Lin; Je-Wei Lan

doi:10.1117/1.JMM.12.1.013019

28 March 2013 Improving thin-film zinc-oxide surface acoustic wave device insertion loss using a grooved reflective grating structure

I-Yu Huang, Chang-Yu Lin, Je-Wei Lan

Author Affiliations +

Funded by: National Science Council, National Science Council and National Sun Yat-sen University of the Republic of China, Taiwan,, National Science Council and National Sun Yat-sen University of the Republic of China, Taiwan, National Sun Yat-sen University

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 1, 013019 (March 2013). https://doi.org/10.1117/1.JMM.12.1.013019

Abstract

A novel silicon groove reflective grating structure (RGS) to reduce effectively the insertion loss of a high C-axis (002) thin-film zinc oxide (ZnO) surface acoustic wave (SAW) device is proposed. The insertion loss (S₂₁ parameter) of three types of SAW devices was investigated and compared; one type had no RGS design, and the other two types had either a conventional metal electrode RGS or a novel etched silicon groove RGS. The wave propagation modes, the harmonic response, and the displacement amplitude profile of the proposed SAW devices were simulated by finite element analysis software (ANSYS). The implemented basic SAW device consists of a sputter-deposited high-quality ZnO thin film on the surface of a Si/SiO ₂ /Si ₃N₄/Cr/Au substrate. The insertion loss of the proposed SAW device with silicon groove RGS can be reduced to −19.49 dB , which is much smaller than the insertion losses of the SAW devices with a metal electrode-type RGS (−33.15 dB ) and without an RGS (−47.9 dB ). The resonant frequencies of the SAW devices studied (47.37 to 48.05 MHz) are in close agreement with the simulated results (46.8 to 47.55 MHz).

Citation Download Citation

I-Yu Huang, Chang-Yu Lin, and Je-Wei Lan "Improving thin-film zinc-oxide surface acoustic wave device insertion loss using a grooved reflective grating structure," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(1), 013019 (28 March 2013). https://doi.org/10.1117/1.JMM.12.1.013019

Published: 28 March 2013

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE